High mobility CMOS circuits

ABSTRACT

Semiconductor structure formed on a substrate and process of forming the semiconductor. The semiconductor includes a plurality of field effect transistors having a first portion of field effect transistors (FETS) and a second portion of field effect transistors. A first stress layer has a first thickness and is configured to impart a first determined stress to the first portion of the plurality of field effect transistors. A second stress layer has a second thickness and is configured to impart a second determined stress to the second portion of the plurality of field effect transistors.

CROSS-REFERENCE TO RELATED APPLICATIONS

The present application is a continuation of U.S. application Ser. No.10/701,526 filed Nov. 6, 2003 now U.S. Pat. No. 7,015,082, thedisclosure of which is expressly incorporated by reference herein in itsentirety.

BACKGROUND OF INVENTION

1. Field of the Invention

The invention generally relates to a semiconductor device and method ofmanufacture and, more particularly, to a complementarymetal-oxide-semiconductor (CMOS) device that includes an etch stop layerwith a selectively varying thickness.

2. Background of the Invention

As semiconductor devices continue to evolve towards higher densities ofcircuit elements, the performance of materials used for the devicesbecomes more critical to overall performance, such as charge carriermobility. CMOS devices fabricated on substrates having a thin strainedsilicon (Si) layer on a relaxed SiGe buffer layer exhibit substantiallyhigher electron and hole mobility in strained Si layers than in bulksilicon layers. Furthermore, metal oxide semiconductor field effecttransistors (MOSFETs) with strained Si channels exhibit enhanced deviceperformance compared to devices fabricated in conventional (unstrained)silicon substrates. Unfortunately, however, as Ge concentrationsincrease to a level required to enhance performance of p-channel fieldeffect transistors, so does defect density.

Another approach for achieving performance enhancement involvesimparting local mechanical stresses. Electron mobility and, thus,n-channel field effect transistor (nFET) performance may be improved byimparting tensile stress either along (i.e., parallel to) the directionof a current flow and/or orthogonal to the direction of current flow.Additionally, hole mobility and, thus, p-channel field effect transistor(PFET) performance, may be enhanced by imparting compressive stressparallel to the direction of current flow and tensile stressperpendicular to the direction of current flow.

Etch stop films may be applied to impart tensile and compressivestresses. For example, a tensile stress may be imparted to an NFETchannel by applying a tensile etch stop film. A compressive stress maybe imparted to a pFET channel by applying a compressive etch stop film.However, such an approach has drawbacks. In particular, the compressivefilm degrades NFET performance, while the tensile film degrades pFETperformance.

Furthermore, although etch stop films may be configured to impartsignificant stresses, relatively thick films are required as the stresstransferred is proportional to film thickness. Problematically, as filmthickness increases, voids are likely to form in the film. This isespecially true in dense structures, such as cache or SRAM cells, wheregates are very closely spaced, e.g., at a minimum pitch. During contactetching, such voids may open and fill with contact metal. As the voidsrun parallel to the gates, the voids filled with contact metal may causecontact shorts, thereby preventing proper circuit functionality.

The invention is directed to overcoming one or more of the problems asset forth above.

SUMMARY OF THE INVENTION

In a first aspect of the invention, a semiconductor structure isprovided. The structure includes a plurality of field effect transistorsand first and second stress layers deposited on portions of the fieldeffect transistors. The plurality of field effect transistors include afirst portion of field effect transistors and a second portion of fieldeffect transistors. A first stress layer has a first thickness and isconfigured to impart a first determined stress to the first portion ofthe plurality of field effect transistors. A second stress has a secondthickness and is configured to impart a second determined stress to thesecond portion of the plurality of field effect transistors.

Furthermore, in an exemplary embodiment, areas of the semiconductor thatwould not experience performance enhancement due to the stress impartedby the first stress layer are devoid of the first stress layer.Likewise, areas of the semiconductor that would not experienceperformance enhancement due to the stress imparted by the second stresslayer are devoid of the second stress layer. The imparted stresses maybe compressive and/or tensile. Additionally, the first and second stresslayers may have the same or different thicknesses.

In another aspect of the invention a semiconductor structure formed on asubstrate includes a first plurality of n-channel field effecttransistors having a first range of spacings between adjacent n-channelfield effect transistors that fall within a first defined spacing range.The structure also includes a second plurality of n-channel field effecttransistors having a second range of spacings between adjacent n-channelfield effect transistors that fall within a second defined spacingrange. Additionally, the structure includes a first plurality ofp-channel field effect transistors having a first range of spacingsbetween adjacent p-channel field effect transistors that fall within afirst defined spacing range. Furthermore, the structure includes asecond plurality of p-channel field effect transistors having a secondrange of spacings between adjacent p-channel field effect transistorsthat fall within a second defined spacing range.

A first tensile layer having a first tensile layer thickness and beingconfigured to impart a first determined tensile stress is applied to thefirst plurality of n-channel field effect transistors. A second tensilelayer having a second tensile layer thickness and being configured toimpart a second determined tensile stress is applied to the secondplurality of n-channel field effect transistors. A first compressivelayer having a first compressive layer thickness and being configured toimpart a first determined compressive stress is applied to the firstplurality of p-channel field effect transistors. A second compressivelayer having a second compressive layer thickness and being configuredto impart a second determined compressive stress is applied to thesecond plurality of p-channel field effect transistors.

In a further aspect of the invention, a process of forming asemiconductor structure is provided. The process entails forming asemiconductor substrate. Next, a plurality of field effect transistorsare formed on the semiconductor substrate. The plurality of field effecttransistors includes a first portion of field effect transistors and asecond portion of field effect transistors. Subsequently, a first stresslayer is deposited. The first stress layer has a first thickness and isconfigured to impart a first determined stress to the first portion ofthe plurality of field effect transistors. A second stress layer is alsodeposited. The second stress layer has a second thickness and isconfigured to impart a second determined stress to the second portion ofthe plurality of field effect transistors.

Furthermore, in an exemplary implementation, portions of the firststress layer may be removed from areas of the semiconductor that wouldnot experience performance enhancement due to the stress imparted by thefirst stress layer. Likewise, portions of the second stress layer may beremoved from areas of the semiconductor that would not experienceperformance enhancement due to the stress imparted by the second stresslayer. The imparted stresses may be compressive and/or tensile.Additionally, the first and second stress layers may have the same ordifferent thicknesses.

BRIEF DESCRIPTION OF THE DRAWINGS

The drawings are as follows:

FIG. 1 shows a CMOS device having a plurality of FETS (i.e., NFETSand/or PFETS);

FIG. 2 shows a plurality of FETs, including a dense group of (i.e., agroup of closely spaced) nFETs, on a semiconductor device;

FIG. 3 shows a thin tensile stress layer applied to the plurality ofFETs from FIG. 2, including the dense group of nFETs;

FIG. 4 shows the thin tensile stress layer removed from all areas exceptthe dense group of nFETs;

FIG. 5 shows the thin tensile stress layer on a dense group of nFETs andan isolated NFET, and a thick tensile layer on the isolated NFET;

FIG. 6 shows a plurality of FETs, including a dense group of (i.e., agroup of closely spaced) pFETs, on a semiconductor device;

FIG. 7 shows a thin compressive stress layer applied to the plurality ofFETs from FIG. 5, including the dense group of pFETs;

FIG. 8 shows the thin compressive stress layer removed from all areasexcept the dense group of pFETs;

FIG. 9 shows a plurality of FETs, including a group of distantly spacednFETs, on a semiconductor device;

FIG. 10 shows a thick tensile stress layer applied to the plurality ofFETs from FIG. 9, including the group of distantly spaced nFETs;

FIG. 11 shows the thick tensile stress layer removed from all areasexcept the group of distantly spaced nFETs;

FIG. 12 shows a plurality of FETs, including a group of distantly spacedpFETs, on a semiconductor device;

FIG. 13 shows a thick compressive stress layer applied to the pluralityof FETs from FIG. 12, including the group of distantly spaced pFETs; and

FIG. 14 shows the thick compressive stress layer removed from all areasexcept the group of distantly spaced pFETs.

DETAILED DESCRIPTION OF EMBODIMENTS OF THE INVENTION

The invention employs selectively applied thin stressed films, such astensile films, thin compressive films, and thick tensile films, toenhance electron and hole mobility in CMOS circuits. An exemplaryprocess in accordance with the invention entails steps of applying eachfilm, and patterning for selectively removing the applied film fromareas that would not experience performance benefit from the appliedstressed film.

Referring now to FIG. 1, a substrate 100 having a plurality of FETS(i.e., NFETS and/or PFETS) 105-125 is shown. The substrate 100 includesareas of different densities of nFETS and pFETs, including areas of highconcentration or density 130 and areas of low concentration or density140. Typically, similar devices are clustered; though the invention isapplicable to devices having nFETs interspersed with pFETs, and viceversa.

The high density area 130 exhibits closely spaced FETs. In such an area,the distance from gate to gate may, for example, be 130 nanometers(nanometers). As used herein, a high density area refers to an area withclosely spaced FETs, even if there are only two FETs in the area. Thelow density or isolated area 140 exhibits FETs with a relativelysubstantial distance from gate to gate. In such an area, the distancefrom gate to gate may, for example, be 200 nanometers or greater. Thesubstrate 100, including the FETs 105-125, may be fabricated in aconventional manner. While FIGS. 1 through 14 illustrate principles ofexemplary implementations of the invention, they are not drawn to scale.Thus, the dimensions, proportions and spacings of device elements maydiffer from those depicted in the Figures.

The stress layer influences what is considered a dense or isolated area.A dense area would not be able to accommodate a thick stress layerwithout a substantial likelihood of void formation. The thicker thelayer, the more space it requires to avoid undesirable void formation.Additionally, some stress layer materials and depositing parameters maybe more conducive to void formation than others. Conversely, an isolatedarea is able to accommodate a thick stress layer without a substantiallikelihood of void formation. While layer thicknesses and distancesbetween FETs are provided herein for illustrative purposes, thoseskilled in the art should appreciate that the invention is not limitedto the specifically provided thicknesses and distances.

Etch stop films (or layers) applied as stress layers in accordance withthe invention may include refractory insulating material or materialswith selective etch and physical properties. By way of example, siliconnitride Si₃N₄ or Si_(x)N_(y), and/or silicon oxynitride Si_(x)ON_(y),may be used for stress films. These materials may be grown or blanketdeposited in a conventional manner, such as by chemical vapor deposition(CVD), plasma enhanced CVD or physical vapor deposition (PVD). Suchfilms can be made with a well controlled thickness. Illustratively, thethickness range may be between 50 to 300 nanometers for a thick film,and 20 to 50 nanometers for a thin film. Etch stop films applied inaccordance with the principles of the invention act primarily as stressinducing layers.

Stress in applied films may be controlled in a conventional manner. Forexample, to control the stress qualities of the film, the depositionpressure and/or plasma power and/or other deposition process parametersmay be varied illustratively, without limiting the scope of theinvention, to achieve a tensile film exhibiting a tensile stress ofapproximately 700 MPa, the following CVD parameters may be used: atemperature of approximately 480° C., a pressure of approiximately 6.25Torr, a spacing between the wafer and the electrode of 490 mils, a flowof 300 sccm of 2% dilute SiH₄ gas, 15 sccm NH₃ gas and 1060 sccm N₂ gasusing RF power of 340 watts. Likewise, without limiting the scope of theinvention, to achieve a compressive film exhibiting a compressive stressof approximately −1400 MPa, the following CVD parameters may be used: atemperature of approximately 480° C., a pressure of approiximately 5.75Torr, a spacing between the wafer and the electrode of 395 mils, a flowof 3000 sccm of 2% dilute SiH₄ gas, 15 sccm NH₃ gas and 1060 sccm N₂ gasusing RF power of 900 watts. Adjusting the deposition process parametersallows control over properties of the deposited material, includingphysical properties such as stress properties.

In accordance with the invention, FETs of different spacings (i.e.,densities or concentrations) may have stressed films of differentthicknesses. In an exemplary implementation, closely spaced nFETs mayhave a thin tensile film to enhance electron mobility and, thus, NFETperformance, while avoiding formation of undesirable voids. Likewise,closely spaced pFETs may have a thin compressive film to enhance holemobility and, thus, PFET performance, again while avoiding formation ofundesirable voids. Similarly, pFETs closely spaced to nFETs would alsohave thin stressed filns. Furthermore, nFETs having a minimum spacinglarge enough to avoid void formation when a thick film is applied, mayhave a thick tensile film, while similarly spaced pFETs may have a thickcompressive film. Of course, nFETs and pFETs may each be further dividedinto more than two categories, with each category exhibiting a range ofdistances between FETs, and each category capable of accommodating astressed film layer of a determined thickness without substantial riskof undesirable void formation. A stressed etch stop film of a determinedthickness or range of thicknesses will apply to each category.

In one implementation, nFETs and pFETs may each be divided into twocategories, i.e., a dense category of closely spaced FETs 130 and anisolated category of distantly spaced FETs 140, as shown in FIG. 1.Referring now to FIG. 2, a dense group of (i.e., a group of closelyspaced) nFETs 205-220 and an isolated FET 225 are shown. In thisimplementation, the dense group is spaced at about 130 nanometers orless, while the isolated FET 225 may exhibit a spacing of greater than130 nanometers.

To impart a tensile stress to the nFETs 205-220, particularly thechannel region of the nFETs 205-220, in accordance with the principlesof the invention, a tensile stress layer 305 is applied over the entiresurface of the semiconductor device, as shown in FIG. 3 and discussedmore fully below. Because the nFETs 205-220 are closely spaced, a thintensile layer is applied. The applied tensile layer 305 is then removed,such as by masking and etching, from areas of the device that do notbenefit from the imparted tensile stress as well as from areas that maybenefit from an alternative stress layer, such as the isolated FET 225.

A thin oxide (e.g., SiO₂) liner (not shown) may be applied, to serve asan etch stop, before the tensile stress layer 305 is applied. The oxideliner may be approximately 1 to 10 nanometers in thickness. The oxideliner guards against unintended etching of the structure and elementsbeneath the applied liner and stress layers. Alternatively, a timedetch, such as a timed dry etch, may be used to remove only the appliedtensile layer from those areas of the substrate 100 that do not benefitfrom the imparted tensile stress.

Referring still to FIG. 3, the thin stressed film 305 may be comprisedof, for example, Si₃N₄. The thin stressed film may also be, for example,Si_(x)N_(y), and/or silicon oxynitride Si_(x)ON_(y). The film 305 may beblanket deposited over the entire surface of the substrate 100 in aconventional manner, such as by CVD, plasma enhanced CVD or PVD. In oneimplementation, the thin stressed film may have a thickness between 20to 50 nanometers. The spacing of the closely packed nFETs is about 130nanometers or less. The film 305 may exhibit a tensile stress ofapproximately 600 to 1500 MPa (Mega-pascals). The film 305 is thusconfigured to impart a tensile stress to the underlying areas.

Next, the thin tensile film 305 is masked on locations where the densenFETs 205-220 are present, and possibly where isolated nFETs arepresent, to allow removal from all other areas (e.g., FET 225) of thesubstrate 100. For example, the desired pattern of nFETs may betransferred to an optical mask, as is well known in the art. The surfaceof the substrate 100 may then be covered with photoresist. The resistmay then be exposed through the mask to radiation that changes itsstructure, polymerizing (i.e., cross linking) determined areas.Unpolymerzied regions may then be removed using a solvent, leaving thepolymerized portions in tact. Subsequent process steps (e.g., etching)will affect only the areas without polymerized photoresist. Thus, thethin tensile film may be removed by etching (e.g., by reactive ionetching using the patterned photoresist as a mask) from all areas (e.g.,FET 225) except where the patterned nFETs (e.g., nFETs 205-220) arepresent, as shown in FIG. 4. Subsequently, any remaining polymerizedphotoresist may be removed using a wet process, such as sulfuric acid,or a dry process, such as O₂ plasma.

As discussed above, the thin tensile layer 305 may be left on isolatedNFETS as shown in FIG. 5. Additional thin (e.g., 20 to 50 nanometers)tensile layers and/or a thick (e.g., 50 to 500 nanometers) tensile layer510 may subsequently be added to the isolated nFETs, such as in a mannerdescribed more fully below, to impart greater tensile stress and therebyachieve further enhancement of electron mobility. Alternatively, thethin tensile layer 305 may be removed from the isolated NFETS; in whichcase, the isolated nFETs may subsequently receive a thick (e.g., 50 to500 nanometers) tensile layer to enhance electron mobility, as discussedmore fully below. Similarly, thin and thick compressive stress layersmay be applied to isolated pFETs, as discussed more fully below.

Subsequently, another oxide liner layer (not shown) may be depositedover the top surface of the entire device to serve as an etch stop,before the next stress layer is applied, as discussed below. The oxideliner guards against unintended etching of elements beneath it,including thin tensile stress layer 305. Alternatively, a timed etch,such as a timed dry etch, may be used to remove only the next layer fromthose areas of the substrate 100 that do not benefit from the impartedstress.

Referring now to FIG. 6, a dense group of (i.e., a group of closelyspaced) pFETs 605-620 and an isolated FET 625 are shown. In oneimplementation, the dense group of pFETs 605-620 is spaced at about 130nanometers or less. To impart a compressive stress to the dense group ofpFETs 605-620, particularly the channel region of the pFETs 605-620, inaccordance with the principles of the invention, a thin compressivestress layer 705 is applied to the surface of the entire device, asshown in FIG. 7.

The thin compressive layer 705 may be comprised of, for example, Si₃N₄.Alternatively, the thin compressive film may be Si_(x)N_(y), and/orsilicon oxynitride Si_(x)ON_(y). The film 705 may be blanket depositedover the entire surface of the substrate 100 in a conventional manner,such as by CVD, plasma enhanced CVD or PVD. In one implementation, thethin compressive film may have a thickness between 20 to 50 nanometers.The thin compressive film 705 may exhibit a compressive stress ofapproximately −600 to −1500 MPa (Mega-pascals). The film 705 is thusconfigured to impart a compressive stress to underlying areas.

Next, the thin compressive film 705 may be masked on locations where thedense pFETs 605-620 are present, and possibly where isolated pFETs arepresent, to allow removal from all other areas of the substrate 100. Forexample, the desired pattern of pFETs may be transferred to an opticalmask in a conventional manner. The surface of the substrate 100 may thenbe covered with photoresist. The resist may then be exposed through themask to radiation that changes its structure, polymerizing (i.e., crosslinking) determined areas. Unpolymerzied regions may then be removedusing a solvent, leaving the polymerized portions in tact. Subsequentprocess steps (e.g., etching) will affect only the areas withoutpolymerized photoresist. Thus, the thin compressive film 705 may beremoved by etching (e.g., by reactive ion etching using the patternedphotoresist as a mask) from all areas (e.g., FET 625) except where thepatterned pFETs (e.g., nFETs 605-620) are present, as shown in FIG. 8.Subsequently, the polymerized photoresist may be removed using a wetprocess, such as sulfuric acid, or a dry process, such as O₂ plasma.

As discussed above, the thin compressive layer 705 may be left onisolated pFETS. Additional thin (e.g., 20 to 50 nanometers) compressivelayers and/or a thick (e.g., 50 to 500 nanometers) compressive layer maysubsequently be added to isolated pFETs in a manner described above toimpart greater compressive stress (e.g., −600 to −1500 MPa) and therebyachieve further enhancement of hole mobility. Alternatively, the thincompressive layer 705 may be removed from the isolated pFETS 625 asshown in FIG. 8; in which case, the isolated pFETs 625 may subsequentlyreceive a thick compressive layer to enhance hole mobility, as discussedmore fully below.

Subsequently, another oxide liner layer (not shown) may be depositedover the top surface of the entire device to serve as an etch stop,before the next stress layer is applied, as discussed below. The oxideliner thus guards against unintended etching of elements beneath it,including thin compressive stress layer 705. Alternatively, a timedetch, such as a timed dry etch, may be used to remove only the nextlayer from those areas of the substrate 100 that do not benefit from thestress imparted by the next layer.

Referring now to FIG. 9, a sparsely populated group of (i.e., a group ofdistantly spaced) nFETs 915, 920 and a dense group of FETs 905, 910 areshown. The sparsely populated group of nFETs is spaced at about 130nanometers or greater. To impart a tensile stress to the nFETs 915, 920,particularly the channel region of the nFETs 915, 920, in accordancewith the principles of the invention, a tensile stress layer 1005 isapplied to the surface of the entire substrate 100, as shown in FIG. 10.Because the nFETs 915, 920 are separated by a relatively substantialdistance, a thick stress layer 1005 may be applied without substantialrisk of void formation. Those skilled in the art will appreciate that,depending upon the order in which stress layers are added, and dependingupon the type of FETs, FETs 905 and 910 may have stress layer (not shownin FIG. 10) beneath layer 1005. Alternatively, a stress layer suitablefor FETs 905 and 910 may be added after stress layer 1005 is added.

The thick tensile film 1005 may be comprised of, for example, Si₃N₄. Thethick tensile film may also be, for example, Si_(x)N_(y), and/or siliconoxynitride Si_(x)ON_(y). The film 1005 may be blanket deposited over theentire surface of the substrate 100 in a conventional manner, such as byCVD, plasma enhanced CVD or PVD. In one implementation, the thicktensile film may have a thickness between 50 to 300 nanometers. Thethick tensile film 1005 may exhibit a tensile stress of approximately600 to 1500 MPa (Mega-pascals). The film 1005 is thus configured toimpart a tensile stress to underlying areas.

Next, the thick tensile film 1005 is masked on locations where theisolated nFETs 915, 920 are present, to allow removal from all otherareas of the substrate 100. For example, the desired pattern of nFETs915, 920 may be transferred to an optical mask in a conventional manner.The surface of the substrate 100 may then be covered with photoresist.The resist may then be exposed through the mask to radiation thatchanges its structure, polymerizing (i.e., cross linking) determinedareas. Unpolymerized regions may then be removed using a solvent,leaving the polymerized portions in tact. Subsequent process steps(e.g., etching) will affect only the areas without polymerizedphotoresist. Thus, the thick tensile film 1005 may be removed by etching(e.g., by reactive ion etching using the patterned photoresist as amask) from all areas (e.g., 905, 910) except where the patterned nFETs915, 920 are present, as shown in FIG. 11. Subsequently, the polymerizedphotoresist may be removed using a wet process, such as sulfuric acid,or a dry process, such as O₂ plasma.

Subsequently, another oxide liner layer (not shown) may be depositedover the top surface of the entire device to serve as an etch stop,before the next stress layer is applied, as discussed below. The oxideliner guards against unintended etching of elements beneath it,including thick tensile stress layer 1005. Alternatively, a timed etch,such as a timed dry etch, may be used to remove only the next layer fromthose areas of the substrate 100 that do not benefit from the stressimparted by the next layer.

Referring now to FIG. 12, a sparsely populated group of (i.e., a groupof distantly spaced) pFETs 1215, 1220 and a dense group of pFETs 1205,1210 are shown. The distantly spaced pFETs may have spacings of greaterthan 130 nanometers, while the closely spaced FETs 1205, 1210 may havespacings of less than 130 nanometers. To impart a compressive stress tothe pFETs 1215, 1220, particularly the channel region of the pFETs 1215,1220, in accordance with the principles of the invention, a compressivestress layer 1305 is applied to the surface of the entire substrate 100,as shown in FIG. 13. Because the pFETs 1215, 1220 are separated by arelatively substantial distance, a thick stress layer 1305 of about 50to 500 nanometers in thickness may be applied without substantial riskof void formation.

The thick compressive film 1305 may be comprised of, for example, Si₃N₄.The thick compressive film may also be, for example, Si_(x)N_(y), and/orsilicon oxynitride Si_(x)ON_(y). The film 1305 may be blanket depositedover the entire surface of the substrate 100 in a conventional manner,such as by CVD, plasma enhanced CVD or PVD. In one implementation, thethick compressive film may have a thickness between 50 to 300nanometers. The thick compressive film 1305 may exhibit a compressivestress of approximately −600 to −1500 MPa (Mega-pascals). The film 1305is thus configured to impart a compressive stress to underlying areas.

Next, the thick compressive film 1305 is masked on locations where theisolated pFETs 1215, 1220 are present, to allow removal from all otherareas (e.g., 1205, 1210) of the substrate 100. For example, the desiredpattern of pFETs 1215, 1220 may be transferred to an optical mask in aconventional manner. The surface of the substrate 100 may then becovered with photoresist. The resist may then be exposed through themask to radiation that changes its structure, polymerizing (i.e., crosslinking) determined areas. Unpolymerized regions may then be removedusing a solvent, leaving the polymerized portions in tact. Subsequentprocess steps (e.g., etching) will affect only the areas withoutpolymerized photoresist. Thus, the thick compressive film 1305 may beremoved by etching from all areas except where the patterned pFETs 1215,1220 are present, as shown in FIG. 14. Subsequently, the polymerizedphotoresist may be removed using a wet process, such as sulfuric acid,or a dry process, such as O₂ plasma.

The order of applying the various stress layers is not critical.Compressive layers may be applied before or after tensile layers. Thicklayers may be applied before or after thin layers.

In an alternative implementation, thick layers may be reduced via timedetching to produce thin stress layers over a densely populated areas.Thus, for example, a thick compressive layer may be applied for allpFETs. The compressive layer may then be removed from all areas that donot benefit from compressive stress such as, for example, areaspopulated with nFETs. Such removal may be carried out in the mannerdescribed above. In areas densely populated with pFETs, the compressivelayer may be reduced in thickness through a wet or dry timed etch. Thereduced thickness may be, for example, 20 to 50 nanometers. IsolatedpFET areas may be protected with a photoresist or etch stop to avoidundesired removal and thinning of the compressive layer.

In another alternative implementation, thin compressive layers may beapplied and built-up in successive layers to achieve desiredthicknesses. Thus, for example, a thin tensile layer of approximately 20to 50 nanometers may be applied for all nFETs. Subsequently, one or moreadditional thin tensile layers, each of approximately 20 to 50nanometers, may be applied for isolated nFETs. The additional thintensile layers may be removed from all areas that would be susceptibleto void formation or that do not benefit from tensile stress, such asareas populated by pFETs. Such removal may be carried out in the mannerdescribed above.

While the invention has been described in terms of exemplaryembodiments, those skilled in the art will recognize that the inventioncan be practiced with modifications and in the spirit and scope of theappended claims.

1. A semiconductor structure formed on a sustrate comprising: aplurality of field effect transitors having a first portion of fieldeffect transitors (FETS) and a second portion of field effecttransitors; a first stress layer having a first thickness and beingconfigured to impart a first determined stress to the first portion ofthe plurality of field effect transitors; and a second stress layerhaving a second thickness and being configured to impart a seconddetermined stress to the second portion of the plurality of field effecttransistors, wherein the first thickness is different than the secondthickness and the first portion of field effect transitors has adifferent spacing or density than the second portion of field effecttransitors.
 2. The semiconductor structure according to claim 1,wherein: the first portion of the plurality of field effect transitorshave spacing between adjacent field effect transitors that fall within afirst defined spacing range; and the second portion of the plurality offield effect transitors have spacings between adjacent field effecttransitors that fall within a second defined spacing range.
 3. Thesemiconductor structure according to claim 1, wherein: the first definedspacing range is less than the second defined spacing range; and thefirst thickness is less than the second thickness.
 4. The semiconductorstructure according to claim 3, wherein the first thickness does notpose a substantial risk to void formation in the first stress layer. 5.The semiconductor structure according to claim 2, wherein: the firstdetermined stress enhances performance of the first portion of theplurality of field effect transitors, without materially degradingperformance of any of the plurality of FETs that are not in the firstportion; and the second determined stress enhances performance of thesecond portion of the plurality of field effect transitors, withoutmaterially degrading performance of any of the plurality of FETs thatare not in the second portion.
 6. The semiconductor structure accordingto claim 5, wherein: the first portion of the plurality of field effecttransistors is comprised of n-channel field effect transistors; thefirst determined stress is a tensile stress; the second portion of theplurality of field effect transistors is comprised of p-channel fieldeffect transistors; and the second determined stress is a compressivestress.
 7. The semiconductor structure according to claim 6, wherein:the first stress layer is formed by a chemical vapor deposition processusing a temperature of about 480° C., a pressure of about 6.25 Torr, aspacing between the semiconductor structure and CVD electrode of about490 mils, a flow of about 300 scm of 2% dilate SiH₄ gas, about 15 sccmNH₃ gas and about 1060 sccm N₂ gas using RF power of about 340 watts. 8.The semiconductor structure according to claim 6, wherein: the secondstress layer is formed by a chemical vapor deposition process using atemperature of about 480°, a pressure of about 5.75 Torr, a spacingbetween the semiconductor structure and CVD electrode of about 395 mils,a flow of about 3000 sccm of 2% dilute SiH₄ gas, about 15 sccm of NH₃gas and 1060 sccm of N₂ gas using RF power of 900 watts.
 9. Thesemiconductor structure according to claim 5, wherein: the first portionof the plurality of field effect transistors is comprised of n-channelfield effect transistors; the first determined stress is a tensilestress; the first defined spacing range is less than the second definedspacing range; and the second portion of the plurality of field effecttransistors is comprised of n-channel field effect transistors; thesecond determined stress is a tensile stress; the first thickness isless than the second thickness; and the first thickness does not pose asubstantial risk of void formation in the first stress layer.
 10. Thesemiconductor structure according to claim 5, wherein: the first portionof the plurality of field effect transistors is comprised of p-channelfield effect transistors; the first determined stress is a compressivestress; the first defined spacing range is less than the second definedspacing range; and the second portion of the plurality of field effecttransistors is comprised of p-channel field effect transistors; thesecond determined stress is a compressive stress; the first thickness isless than the second thickness; and the first thickness does not pose asubstantial risk of void formation in the first stress layer.
 11. Asemiconductor structure formed on a substrate comprising: a firstplurality of n-channel field effect transistors having spacings betweenadjacent n-channel field effect transistors that fall within a firstdefined spacing range; a second plurality of n-channel field effecttransistors having spacings between adjacent n-channel field effecttransistors that fall within a second defined spacing range; a firstplurality of p-channel field effect transistors having spacings betweenadjacent p-channel field effect transistors that fall within a thirddefined spacing range; a second plurality of p-channel field effecttransistors having spacings between adjacent p-channel field effecttransistors that fall within a fourth defined spacing range; a firsttensile layer having a first tensile layer thickness and beingconfigured to impart a first determined tensile stress to the firstplurality of n-channel field effect transistors; a second tensile layerhaving a second tensile layer thickness and being configured to impart asecond determined tensile stress to the second plurality of n-channelfield effect transistors; a first compressive layer having a firstcompressive layer thickness and being configured to impart a firstdetermined compressive stress to the first plurality of p-channel fieldeffect transistors; and a second compressive layer having a secondcompressive layer thickness and being configured to impart a seconddetermined compressive stress to the second plurality of p-channel fieldeffect transistors.
 12. The semiconductor structure according to claim11, wherein each of the first tensile layer; second tensile layer; firstcompressive layer and second compressive layer is deposited on an SiO₂liner.
 13. The semiconductor structure according to claim 11, wherein:the first defined spacing range is less than the second defined spacingrange; and the third defined spacing range is less than the fourthdefined spacing range.
 14. The semiconductor structure according toclaim 13, wherein: the first tensile layer thickness is less than thesecond tensile layer thickness; and the first compressive layerthickness is less than the second compressive layer thickness.
 15. Thesemiconductor structure according to claim 14, wherein: the firsttensile layer thickness does not pose a substantial risk of voidformation in the first tensile layer; and the first compressive layerthickness does not pose a substantial risk of void formation in thefirst compressive layer.
 16. The semiconductor structure according toclaim 15, wherein: the first determined tensile stress enhances electronmobility in the first plurality of n-channel field effect transistors,without materially degrading performance of the first plurality ofp-channel field effect transistors and the second plurality of p-channelfield effect transistors; and the first determined compressive stressenhances hole mobility in the first plurality of p-channel field effecttransistors, without materially degrading performance of the firstplurality of n-channel field effect transistors and the second pluralityof n-channel field effect transistors.
 17. The semiconductor structureaccording to claim 16, wherein: the first tensile layer thickness isproportional to the first determined spacing range; the second tensilelayer thickness is proportional to the second determined spacing range;the first compressive layer thickness is proportional to the thirddetermined spacing range; and the second compressive layer thickness isproportional to the fourth determined spacing range.
 18. Thesemiconductor structure according to claim 16, wherein the first tensilelayer, second tensile layer, first compressive layer and secondcompressive layer, are comprised of materials from the group consistingof silicon nitride and silicon oxynitride.
 19. The semiconductorstructure according to claim 16, wherein: the first tensile layer andsecond tensile layer each exhibit a tensile stress of about 600 to 1500MPa; and the first compressive layer and second compressive layer eachexhibit a compressive stress of about −600 to −1500 MPa.
 20. A processof forming a semiconductor structure, comprising: forming a plurality offield effect transistors on a semiconductor substrate, the plurality offield effect transistors including a first portion of field effecttransistors and a second portion of field effect transistors; depositinga first stress layer having a first thickness and being configured toimpart a first determined stress to the first portion of the pluralityof field effect transistors; and depositing a second stress layer havinga second thickness and being configured to impart a second determinedstress to the second portion of the plurality of field effecttransistors, wherein the first thickness is different than the secondthickness and the first portion of field effect transistors has adifferent spacing or density than the second portion of field effecttransistors.
 21. A process of forming a semiconductor structureaccording to claim 20, further comprising: removing portions of thefirst stress layer from areas of the semiconductor that would notexperience performance enhancement due to the first determined stress;and removing portions of the second stress layer from areas of thesemiconductor that would not experience performance enhancement due tothe second determined stress.
 22. A process of forming a semiconductorstructure according to claim 21, wherein the first thickness is lessthan the second thickness.
 23. A semiconductor circuit comprising asubstrate; a plurality of field effect transistors formed on thesubstrate, the plurality of field effect transistors including a firstportion of field effect transistors and a second portion of field effecttransistors; a first stress layer having a first thickness and beingconfigured to impart a first determined stress to the first portion ofthe plurality of field effect transistors; a second stress layer havinga second thickness and being configured to impart a second determinedstress to the second portion of the plurality of field effecttransistors. the first portion of the plurality of field effecttransistors have spacings between adjacent field effect transistors thatfall within a first defined spacing range; and the second portion of theplurality of field effect transistors have spacings between adjacentfield effect transitors that fall within a second defined spacing range,wherein: the first defined spacing range is less than the second definedspacing range; and the first thickness is less than the secondthickness.